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Fundamental Principles of Optical Lithography
Language: en
Pages: 503
Authors: Chris Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Fundamental Principles of Optical Lithography
Language: en
Pages: 534
Authors: Chris Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2008-03-11 - Publisher: John Wiley & Sons

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Principles of Lithography
Language: en
Pages: 446
Authors: Harry J. Levinson
Categories: Technology & Engineering
Type: BOOK - Published: 2005 - Publisher: SPIE Press

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Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were
Field Guide to Optical Lithography
Language: en
Pages: 122
Authors: Chris A. Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2006 - Publisher: Society of Photo Optical

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This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit
Microlithography
Language: en
Pages: 864
Authors: Bruce W. Smith
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

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This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e