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Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics - 2004
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The scaling of device dimensions with a simultaneous increase in functional density has imposed tremendous challenges for materials, technology, integration and
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, 2003
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Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transist