In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on
Space Microsystems and Micro/Nano Satellites covers the various reasoning and diverse applications of small satellites in both technical and regulatory aspects,
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersb
An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamen