High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology
Author :
Publisher : John Wiley & Sons
Total Pages : 560
Release :
ISBN-10 : 9783527646364
ISBN-13 : 3527646361
Rating : 4/5 (361 Downloads)

Book Synopsis High-k Gate Dielectrics for CMOS Technology by : Gang He

Download or read book High-k Gate Dielectrics for CMOS Technology written by Gang He and published by John Wiley & Sons. This book was released on 2012-08-10 with total page 560 pages. Available in PDF, EPUB and Kindle. Book excerpt: A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.


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