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Language: en
Pages: 312
Pages: 312
Type: BOOK - Published: 2004 - Publisher: Artech House
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Syste
Language: en
Pages:
Pages:
Type: BOOK - Published: - Publisher:
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2004 - Publisher: Artech House
Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wir
Language: en
Pages: 552
Pages: 552
Type: BOOK - Published: 2011-03-21 - Publisher: John Wiley & Sons
The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found i
Language: en
Pages: 327
Pages: 327
Type: BOOK - Published: 2005-04-12 - Publisher: Elsevier
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro
