Download or read book Field Effect Transistor Fabrication with Silicon-on-insulator Methods written by Franklin Bradley Sharer and published by . This book was released on 2000 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: The growth of consumer electronics over the past few decades has been directly related to the advances in semiconductor technology. Devices have consistently grown smaller, faster, and cheaper at regular intervals leading to revolutionary new products reaching the market place. The basic building block of digital systems, such as the personal computer, is the Field Effect Transistor (FET). This thesis describes some of the silicon fabrication methods that are used to produce the FET and other related devices. The silicon-on-insulator technique that has been used to improve device performance is also discussed and a brief overview of the operation of various forms of the FET follows. An array of FETs was fabricated and tested using the clean room facility at the University of North Carolina at Charlotte and this thesis concludes with a description of the fabrication sequence and the results. The fabrication sequence includes mask design and generation, photolithography, doping, contact formation, and device testing.