Investigations of Surface Interactions and Deposition Mechanisms in Plasma Enhanced Chemical Vapor Deposition of Silicon-based Materials
| Author | : Patrick R. McCurdy |
| Publisher | : |
| Total Pages | : 384 |
| Release | : 1999 |
| ISBN-10 | : OCLC:43761484 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Investigations of Surface Interactions and Deposition Mechanisms in Plasma Enhanced Chemical Vapor Deposition of Silicon-based Materials by : Patrick R. McCurdy
Download or read book Investigations of Surface Interactions and Deposition Mechanisms in Plasma Enhanced Chemical Vapor Deposition of Silicon-based Materials written by Patrick R. McCurdy and published by . This book was released on 1999 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
