Low Temperature Silicon Oxide and Flourinated Silicon Oxide Films Prepared by Plasma Enhanced Chemical Vapor Deposition Using Disilane as Silicon Precursor
| Author | : Juho Song |
| Publisher | : |
| Total Pages | : 236 |
| Release | : 1996 |
| ISBN-10 | : OCLC:35765430 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Low Temperature Silicon Oxide and Flourinated Silicon Oxide Films Prepared by Plasma Enhanced Chemical Vapor Deposition Using Disilane as Silicon Precursor by : Juho Song
Download or read book Low Temperature Silicon Oxide and Flourinated Silicon Oxide Films Prepared by Plasma Enhanced Chemical Vapor Deposition Using Disilane as Silicon Precursor written by Juho Song and published by . This book was released on 1996 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt:
