Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane
Author | : Todd Alan Brooks |
Publisher | : |
Total Pages | : 286 |
Release | : 1988 |
ISBN-10 | : UCAL:$C71951 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane by : Todd Alan Brooks
Download or read book Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane written by Todd Alan Brooks and published by . This book was released on 1988 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: