Handbook of Plasma Processing Technology
Author | : Stephen M. Rossnagel |
Publisher | : William Andrew |
Total Pages | : 523 |
Release | : 1990 |
ISBN-10 | : 0815512201 |
ISBN-13 | : 9780815512202 |
Rating | : 4/5 (202 Downloads) |
Book Synopsis Handbook of Plasma Processing Technology by : Stephen M. Rossnagel
Download or read book Handbook of Plasma Processing Technology written by Stephen M. Rossnagel and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.