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Language: en
Pages: 235
Pages: 235
Type: BOOK - Published: 1999-01-28 - Publisher: Cambridge University Press
An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Language: en
Pages: 232
Pages: 232
Type: BOOK - Published: 1999-01-28 - Publisher: Cambridge University Press
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etch
Language: en
Pages: 634
Pages: 634
Type: BOOK - Published: 1997-05-31 - Publisher: Springer Science & Business Media
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2001 - Publisher:
For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufact
Language: en
Pages: 126
Pages: 126
Type: BOOK - Published: 2014-10-25 - Publisher: Springer
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat
