Selected Papers on Resolution Enhancement Techniques in Optical Lithography
Author | : F. M. Schellenberg |
Publisher | : SPIE-International Society for Optical Engineering |
Total Pages | : 910 |
Release | : 2004 |
ISBN-10 | : UCSD:31822032513939 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Selected Papers on Resolution Enhancement Techniques in Optical Lithography by : F. M. Schellenberg
Download or read book Selected Papers on Resolution Enhancement Techniques in Optical Lithography written by F. M. Schellenberg and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 910 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.