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During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the mos
Handbook of Wafer Bonding
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Authors: Peter Ramm
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The focus behind this book on wafer bonding is the fast paced changes in the research and development in three-dimensional (3D) integration, temporary bonding a
Semiconductor Wafer Bonding
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Pages: 310
Authors: H. Baumgart
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3D and Circuit Integration of MEMS
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Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building
Wafer Level 3-D ICs Process Technology
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This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-pa