The Design and Construction of a High Density Plasma Source

The Design and Construction of a High Density Plasma Source
Author :
Publisher :
Total Pages : 106
Release :
ISBN-10 : OCLC:949371560
ISBN-13 :
Rating : 4/5 ( Downloads)

Book Synopsis The Design and Construction of a High Density Plasma Source by : Harish Subbaraman

Download or read book The Design and Construction of a High Density Plasma Source written by Harish Subbaraman and published by . This book was released on 2006 with total page 106 pages. Available in PDF, EPUB and Kindle. Book excerpt:


The Design and Construction of a High Density Plasma Source Related Books

The Design and Construction of a High Density Plasma Source
Language: en
Pages: 106
Authors: Harish Subbaraman
Categories:
Type: BOOK - Published: 2006 - Publisher:

DOWNLOAD EBOOK

High Density Plasma Sources
Language: en
Pages: 445
Authors: Oleg A. Popov
Categories: Science
Type: BOOK - Published: 1995 - Publisher: William Andrew

DOWNLOAD EBOOK

This book presents a comprehensive description of the most promising high density plasma sources operated at low and intermediate pressures which are used, or c
High Density Plasma Sources
Language: en
Pages: 467
Authors: Oleg A. Popov
Categories: Science
Type: BOOK - Published: 1996-12-31 - Publisher: Elsevier

DOWNLOAD EBOOK

This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,
Design of High Density Plasma Sources for Materials Processing
Language: en
Pages: 62
Authors: Michael A. Lieberman
Categories:
Type: BOOK - Published: 1993 - Publisher:

DOWNLOAD EBOOK

High-Density Plasma Source for Large-Area Chemical Vapor Deposition of Diamond Films
Language: en
Pages: 4
Authors:
Categories:
Type: BOOK - Published: 1994 - Publisher:

DOWNLOAD EBOOK

During this program Science Research Laboratory (SRL) and the Plasma Processing Group in the Department of Chemical Engineering at MIT are developing a large-ar