Download or read book Ulsi Front-end Technology: Covering From The First Semiconductor Paper To Cmos Finfet Technology written by Wai Shing Lau and published by World Scientific. This book was released on 2017-08-23 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.