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MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials
Micro-Nano Electrochemical Systems and Fabrication Techniques Handbook
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This book is a collection of researches by various experts who share their analysis of current trends and future implications of micro-nano electrochemical syst
Micro and Nano Fabrication
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book prov
Advanced MEMS/NEMS Fabrication and Sensors
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
MEMS and NEMS
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The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every