Characterization of Plasma-Enhanced CVD Processes: Volume 165
| Author | : Gerald Lucovsky |
| Publisher | : Mrs Proceedings |
| Total Pages | : 280 |
| Release | : 1990-09-05 |
| ISBN-10 | : UOM:39015018851504 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Characterization of Plasma-Enhanced CVD Processes: Volume 165 by : Gerald Lucovsky
Download or read book Characterization of Plasma-Enhanced CVD Processes: Volume 165 written by Gerald Lucovsky and published by Mrs Proceedings. This book was released on 1990-09-05 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
