Characterization of Silicon Epitaxy Deposited by Plasma-enhanced Chemical Vapor Deposition at Low Temperatures and Very Low Pressures
| Author | : Linda Mason Garverick |
| Publisher | : |
| Total Pages | : 374 |
| Release | : 1987 |
| ISBN-10 | : OCLC:17642078 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Characterization of Silicon Epitaxy Deposited by Plasma-enhanced Chemical Vapor Deposition at Low Temperatures and Very Low Pressures by : Linda Mason Garverick
Download or read book Characterization of Silicon Epitaxy Deposited by Plasma-enhanced Chemical Vapor Deposition at Low Temperatures and Very Low Pressures written by Linda Mason Garverick and published by . This book was released on 1987 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt:
