Download or read book Epitaxial Growth of Semi-Insulating GaAs written by and published by . This book was released on 1977 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: The objective of this program is to develop techniques for the vapor phase growth of high resistivity epitaxial layers of gallium arsenide on semi-insulating gallium arsenide substrates. A capability to grow such layers of high quality material with minimum structural defects and good surface quality for use as 'buffer' layers prior to the growth of active layers for such devices as FETS and TELDS will eliminate the device performance problems caused by poor and inconsistent substrate quality. (Author).