Download or read book In Situ Process Diagnostics and Intelligent Materials Processing: Volume 502 written by Peter A. Rosenthal and published by Mrs Proceedings. This book was released on 1998-07-17 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focuses on the rapidly developing field of sensor technology for process monitoring and control during the fabrication of advanced materials and structures. Of high interest among the 39 papers are sensor-driven, closed-loop control of the fabrication process and product-state monitoring. Among the processes considered are several forms of vapor deposition, molecular beam epitaxy, rapid thermal processing, reactive-ion and plasma etching, electron beam evaporation, and sputtering. Monitoring variable such as temperature, composition, and thickness are described for a range of materials including electronic and optical thin-films, particles, and nanostructures. Annotation copyrighted by Book News, Inc., Portland, OR