Low Temperature Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Microcrystalline Silicon on Organic and Inorganic Substrates
Author | : Christopher G. Makosiej |
Publisher | : |
Total Pages | : 222 |
Release | : 1999 |
ISBN-10 | : OCLC:41478178 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Low Temperature Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Microcrystalline Silicon on Organic and Inorganic Substrates by : Christopher G. Makosiej
Download or read book Low Temperature Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Microcrystalline Silicon on Organic and Inorganic Substrates written by Christopher G. Makosiej and published by . This book was released on 1999 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: