Download or read book Measurement Technology for Micro-Nanometer Devices written by Wendong Zhang and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices