Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
Author | : Chue-san Yoo |
Publisher | : |
Total Pages | : 210 |
Release | : 1988 |
ISBN-10 | : OCLC:19689124 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films by : Chue-san Yoo
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