Physics and Technology of High-k Gate Dielectrics 4

Physics and Technology of High-k Gate Dielectrics 4
Author :
Publisher : The Electrochemical Society
Total Pages : 565
Release :
ISBN-10 : 9781566775038
ISBN-13 : 1566775035
Rating : 4/5 (035 Downloads)

Book Synopsis Physics and Technology of High-k Gate Dielectrics 4 by : Samares Kar

Download or read book Physics and Technology of High-k Gate Dielectrics 4 written by Samares Kar and published by The Electrochemical Society. This book was released on 2006 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.


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