Surface Potential of Dual Material Gate MOSFET with High-k Dielectrics

Surface Potential of Dual Material Gate MOSFET with High-k Dielectrics
Author :
Publisher : LAP Lambert Academic Publishing
Total Pages : 64
Release :
ISBN-10 : 3659421227
ISBN-13 : 9783659421228
Rating : 4/5 (228 Downloads)

Book Synopsis Surface Potential of Dual Material Gate MOSFET with High-k Dielectrics by : Swapnadip De

Download or read book Surface Potential of Dual Material Gate MOSFET with High-k Dielectrics written by Swapnadip De and published by LAP Lambert Academic Publishing. This book was released on 2013 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt: The shrinking of device dimension leads to reduction of gate oxide thickness. As a result of this the undesirable hot electron effect and the gate tunneling current is increased. In order to overcome this drawback high-k materials are used instead of silicon dioxide as the insulating material underneath the gate. High-k dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dioxide gate dielectric.Among various high-k materials, Hafnium oxide (HfO2), Tantalum pent oxide (Ta2O5) these materials appear to be the candidates for replacing silicon oxide. These high-k dielectrics exhibit a trend of decreasing barrier height with increasing dielectric constant.The high-k materials with far higher permittivity create same gate capacitance for thicker dielectric. In this book the main focus has been on the modeling and the influence of depletion layers around the source and the drain regions on the sub threshold surface potential of a short-channel DMG MOS transistor with a uniformly-doped channel.


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