Download or read book Surface Reactions During Plasma Enhanced Chemical Vapor Deposition of Silicon and Silicon Based Dielectrics written by Atul Gupta and published by . This book was released on 2001 with total page 163 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: Plasma deposition, Surface chemistry, Ab-initio calculations, Reaction mechanisms, Kinetics, Amorphous silicon, Silicon dioxide.