Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane
Author | : Yanyao Yu |
Publisher | : |
Total Pages | : 116 |
Release | : 1993 |
ISBN-10 | : OCLC:29983777 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane by : Yanyao Yu
Download or read book Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane written by Yanyao Yu and published by . This book was released on 1993 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: