Ultra Clean Processing of Semiconductor Surfaces VIII
Author | : Paul Mertens |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 400 |
Release | : 2007-11-20 |
ISBN-10 | : 9783038131953 |
ISBN-13 | : 3038131954 |
Rating | : 4/5 (954 Downloads) |
Book Synopsis Ultra Clean Processing of Semiconductor Surfaces VIII by : Paul Mertens
Download or read book Ultra Clean Processing of Semiconductor Surfaces VIII written by Paul Mertens and published by Trans Tech Publications Ltd. This book was released on 2007-11-20 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.